We have a track record of supplying to major domestic semiconductor manufacturing equipment manufacturers! We finish aluminum parts, such as vacuum chambers, with high precision.
We would like to introduce our production achievements related to semiconductor manufacturing equipment parts.
We have a track record of manufacturing and delivering "vacuum chambers," "in-chamber products," "chamber peripheral products," and "deep-drawing products (up to 650mm)" for PC, LL, and TM. Utilizing vacuum component-related technologies such as groove and seal surface processing, we aim to create higher precision products.
We can also accommodate various joining and surface treatment methods. We respond to customer needs with electron beam welding (EBW), brazing, TIG welding, hard anodizing, mixed acid anodizing, electroless nickel plating, Teflon coating, and more.
Additionally, our production management system is developed in-house, enabling flexible production and delivery management.
【Product Examples】
■ Vacuum Chambers (PC, LL, TM)
■ In-Chamber Products (such as upper and lower electrodes)
■ Chamber Peripheral Products (such as LLM, LID)
■ Gate Valve Products
■ Deep-Drawing Products (up to 650mm)
*For more details, please refer to the PDF document or feel free to contact us.